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Semiconductor device structure on thermally enhanced diamond, and method associated with same
Description: The technology presents an innovative approach to fabricate GaN-on-diamond (and other semiconductor-on-diamond) wafers without the need for wafer bonding, which traditionally involves a dielectric layer that compromises thermal conductivity. By eliminating the use of low thermally conductive dielectric layers in the wafer bonding process,...
Published: 12/19/2024
|
Inventor(s):
Raju Ahmed
,
Edwin Piner
Keywords(s):
AIGaN/GaN HEMT
,
CVD diamond
,
ELOG
,
GaN-on-diamond
,
TBR
Category(s):
Semiconductor Fabrication
Material Selective Regrowth Structure and Method
Description: This technology outlines a precise method for constructing nanoscale structures by forming a window in a semiconductor structure and sequentially depositing and regrowing materials within this window. The process involves a substrate, a first layer, and a mask layer, where a second layer is deposited such that a gap remains. This gap is...
Published: 7/29/2024
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Inventor(s):
Edwin Piner
Keywords(s):
Depositing and Regrowing Materials
,
Nanoscale Structures
,
Semiconductor Structure
Category(s):
Nanotechnology
,
Semiconductor Fabrication
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